Books by Robert N. E. Patel
2 titles available, newest first by original publication date.

Silicon Wafer Cleaning Manual for Modern Semiconductor Manufacturing: Wet Chemistry, Plasma and Dry Cleaning, and Contamination Control for Process an
Robert N. E. Patel
$182.99

Modern Semiconductor Fabrication Handbook: The Complete Process Engineer's Guide to Lithography, Doping, Etch, Deposition, Yield, and Advanced Packagi
Robert N. E. Patel
$117.99