Plasma Processes for Semiconductor Fabrication
$182.99Hardcover
In stock, ships in 1-2 business days
Free standard shipping on orders over $40. ISBN 9780521591751
1
Details
- Format
- Hardcover
- ISBN-13
- 9780521591751
- Publisher
- Cambridge University Press
- Published
- January 28, 1999
- Pages
- 232
- Weight
- 20.8 oz
- Subject
- Computers
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